A single-side microcavity–diaphragm–channel one-step formation method for low-cost and high-yield volume production of micro flow sensors
A single-side microcavity–diaphragm–channel one-step formation method for low-cost and high-yield volume production of micro flow sensors
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DOI：
10.1016/j.mee.2015.04.074
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发表时间：
2015-05
影响因子：
2.3
通讯作者：
F. Song;Jiachou Wang
中科院分区：
文献类型：
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作者：
F. Song;Jiachou Wang
