E-BEAM INDUCED X-RAY MASK REPAIR WITH OPTIMIZED GAS NOZZLE GEOMETRY
E-BEAM INDUCED X-RAY MASK REPAIR WITH OPTIMIZED GAS NOZZLE GEOMETRY
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DOI：
10.1016/0167-9317(91)90093-s
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发表时间：
1991-03-01
影响因子：
2.3
通讯作者：
BRUNGER, WH
中科院分区：
文献类型：
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作者：
KOHLMANN, KT;THIEMANN, M;BRUNGER, WH
为了在修复X射线掩模上的明显缺陷时实现高吞吐量，最大化沉积过程的生长速率非常重要。在喷嘴布置中，生长速率受到前体气体通量的限制。使用一个特殊的喷嘴几何形状，钨的沉积速率提高了4倍以上的几何形状相比，常用的。此外，沉积物的特征在于其在X射线光刻的对比度。发现它们的钨含量随着气体流量的增加而增加。因此，可以通过提供高气体通量来最小化X射线掩模的修复时间。
For high throughput in the repair of clear defects on X-ray masks, it is very important to maximize the growth rate of the deposition process. In a nozzle arrangement, the growth rate is limited by the precursor gas flux. Using a special nozzle geometry, the deposition rate of tungsten was enhanced by a factor of more than 4 compared to a geometry commonly used. In addition, the deposits were characterized by their contrast in X-ray lithography. Their tungsten content was found to increase with increasing gas flux. Hence, the repair time of X-ray masks can be minimized by providing high gas flux.