Masafumi SUZUKI,Shigeru WATAMABE,Noburo YOSHIMUA and Hiriyuki FUJITA: "The Measurement of Friction Coefficient for Various Thin Films Using Millimeter-size Movers Driven by Electrostatic Froce" Proceedings of the 2nd Internationalll Conference Applied Ele
Masafumi SUZUKI,Shigeru WATAMABE,Noburo YOSHIMUA and Hiriyuki FUJITA: "The Measurement of Friction Coefficient for Various Thin Films Using Millimeter-size Movers Driven by Electrostatic Froce" Proceedings of the 2nd Internationalll Conference Applied Ele
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Masafumi SUZUKI、Shigeru WATAMABE、Noburo YOSHIMUA 和 Hiriyuki FUJITA：“使用静电力驱动的毫米级动子测量各种薄膜的摩擦系数”第二届国际应用电子会议论文集
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