TRACE CHEMICAL VAPOR DETECTION USING SAW DELAY-LINE OSCILLATORS
TRACE CHEMICAL VAPOR DETECTION USING SAW DELAY-LINE OSCILLATORS
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DOI：
10.1109/t-uffc.1987.26929
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发表时间：
1987-03-01
影响因子：
3.6
通讯作者：
BALLANTINE, DS
中科院分区：
文献类型：
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作者：
WOHLTJEN, H;SNOW, AW;BALLANTINE, DS
SAW延迟线振荡器的谐振频率被证明是非常敏感的薄的有机薄膜，沉积到延迟线表面上的存在。理论表明，SAW器件对质量负载的灵敏度取决于谐振频率的平方。这种依赖性已被实验研究，使用设备谐振在31，52和112 MHz，涂有有机膜的精确控制的组成和厚度。SAW振荡器的质量灵敏度可以被利用，使非常敏感的化学传感器，如果一个适当的吸附涂层应用到该设备。从SAW延迟线振荡器在290 MHz（迄今报道的最高频率SAW化学传感器）工作获得的结果表明，浓度基本上低于100十亿分之一（按体积计）的有机蒸气的快速检测是容易实现的。
The resonant frequencies of SAW delay line oscillators are shown to be very sensitive to the presence of thin organic films that are deposited onto the delay line surface. Theory suggests that the sensitivity of the SAW device to mass loading depends on the square of the resonant frequency. This dependence has been studied experimentally using devices resonating at 31, 52, and 112 MHz that were coated with organic films of precisely controlled composition and thickness. The mass sensitivity of SAW oscillators can be exploited to make very sensitive chemical sensors if an appropriate sorptive coating is applied to the device. Results obtained from a SAW delay line oscillator operating at 290 MHz (the highest frequency SAW chemical sensor reported to date) suggest that the rapid detection of organic vapors at concentrations substantially below 100 parts per billion (by volume) is readily achievable.