A new systematic method of characterization for the strength of thin films on substrates—evaluation of mechanical properties by means of ‘film projection’
A new systematic method of characterization for the strength of thin films on substrates—evaluation of mechanical properties by means of ‘film projection’
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一种表征基底上薄膜强度的新系统方法——通过“薄膜投影”评估机械性能
DOI：
10.1016/s0040-6090(02)00426-1
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发表时间：
2002
期刊：
影响因子：
2.1
通讯作者：
H. Abé
中科院分区：
文献类型：
--
作者：
S. Kamiya;Hiroki Kimura;K. Yamanobe;M. Saka;H. Abé
