Site-Selective Formation of Polymer Ultrathin Films Using the Ink-Jet Method onto Patterned Fluoroalkylsilane Monolayer Substrate
Site-Selective Formation of Polymer Ultrathin Films Using the Ink-Jet Method onto Patterned Fluoroalkylsilane Monolayer Substrate
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DOI：
10.1380/jsssj.27.108
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
M. Morita;Shigekazu Yasutake;H. Ishizuka;J. Fukai;A. Takahara
中科院分区：
文献类型：
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作者：
M. Morita;Shigekazu Yasutake;H. Ishizuka;J. Fukai;A. Takahara
本文提出了一种利用氟烷基硅烷单层图案化基底和喷墨技术制备聚合物薄膜的新型微加工方法。本研究的目的是建立基本的方法，用于利用图案化的氟烷基硅烷单层（Rf）/硅羊毛（Si-OH）表面的润湿对比度的聚合物薄膜的位置选择性形成。通过真空紫外光刻制备的Rf/Si-OH图案表面分别具有疏液的Rf和亲液的Si-OH相。使用聚苯乙烯/二甲苯溶液通过喷墨方法涂覆具有润湿对比度的图案化表面。图案化的聚苯乙烯薄膜选择性地形成在亲液区域上。
We have proposed herein a novel microfabrication method for polymer ultrathin films that utilizes fluoroalkylsilane monolayer patterned substrates and ink-jet technology. The purpose of this study is to establish the fundamental methods for site-selective formation of polymer thin film utilizing wetting contrast of patterned fluoroalkylsilane monolayer (Rf)/si-lanol (Si-OH) surfaces. Rf/Si-OH patterned surface prepared by the VUV-rays lithography have lyophobic Rf and lyophilic Si-OH phases, respectively. Polystyrene/xylene solution was used to coat the patterned surface with wetting contrast by the ink-jet method. The patterned polystyrene ultrathin films were selectively formed on lyophilic areas.