Lithium‐Manganese‐Oxide Thin‐Film Cathodes Prepared by Plasma‐Enhanced Chemical Vapor Deposition
Lithium‐Manganese‐Oxide Thin‐Film Cathodes Prepared by Plasma‐Enhanced Chemical Vapor Deposition
复制标题
等离子体增强化学气相沉积制备锂锰氧化物薄膜正极
DOI：
10.1149/1.1391881
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发表时间：
1999
影响因子：
3.9
通讯作者：
D. Benson
中科院分区：
文献类型：
--
作者：
Ping Liu;J. Zhang;J. Turner;C. Tracy;D. Benson
采用等离子体增强化学气相沉积技术制备了锂锰氧化物薄膜电极。工艺参数，如反应物的流速，沉积温度，和RF功率已系统地改变，以优化充电和放电性能。薄膜是非晶态的，如通过X射线衍射光谱法所发现的，并且可以在4.5至3 V或4.5至2.5 V的范围内可逆地循环，最大容量分别为30和39 {mu}Ah/cm{sup 2}。薄膜的容量衰减约为0.001 μ m。当在液体电解质中测试时，超过700次循环，每次循环0.04%。对于在4.5 V和3 V之间的循环进行优化的膜在初始循环期间表现出充电容量和放电容量之间的近乎完美的平衡，并且在随后的循环中也显示出非常小的容量衰减。结果表明，这些锂锰氧化物薄膜是用作薄膜锂离子电池阴极的良好候选者。
Lithium-manganese-oxide thin-film electrodes have been fabricated using the plasma-enhanced chemical vapor deposition technique. Process parameters such as flow rates of the reactants, deposition temperature, and RF power have been systematically varied to optimize the charge and discharge properties. The thin films are amorphous as found by X-ray diffraction spectrometry and can be cycled reversibly in the range from 4.5 to 3 V or 4.5 to 2.5 V with maximum capacities of 30 and 39 {mu}Ah/cm{sup 2}, respectively. The capacity fade of the films is ca. 0.04% per cycle over more than 700 cycles when tested in liquid electrolytes. Films which are optimized for cycling between 4.5 and 3 V demonstrate a near-perfect balance between the charge and discharge capacities during the initial cycle and also show very small capacity fade in the subsequent cycles. Results indicate that these lithium manganese oxide thin films are good candidates for use as cathodes in thin-film lithium-ion batteries.