Determination of the three-dimensional structure of dislocations in silicon by synchrotron white X-ray topography combined with a topo-tomographic technique
Determination of the three-dimensional structure of dislocations in silicon by synchrotron white X-ray topography combined with a topo-tomographic technique
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同步加速器白光X射线形貌术结合地形断层扫描技术测定硅中位错的三维结构
DOI:
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发表时间:
2004
期刊:
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通讯作者:
梶原堅太郎
中科院分区:
文献类型:
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作者:
川戸清爾;太子敏則;飯田敏;鈴木芳文;近浦吉則;梶原堅太郎