Laser-induced damage threshold of camera sensors and micro-optoelectromechanical systems
Laser-induced damage threshold of camera sensors and micro-optoelectromechanical systems
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DOI：
10.1117/1.oe.56.3.034108
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发表时间：
2017-03-01
影响因子：
1.3
通讯作者：
Eberle, Bernd
中科院分区：
文献类型：
--
作者：
Schwarz, Bastian;Ritt, Gunnar;Eberle, Bernd
激光系统朝着更紧凑和高效器件的不断发展对电光成像传感器（例如互补金属氧化物半导体（CMOS）和电荷耦合器件）构成了越来越大的威胁。这些类型的电子传感器不仅用于日常生活中，也用于军事或民用安全应用。在专用于特定任务的相机系统中，微光机电系统（例如数字微镜器件（DMD））是光学设置的一部分。在这样的系统中，DMD可以位于光学器件的中间焦平面处，并且它也容易受到激光损坏。我们工作的目标是增强对暴露于激光的此类设备的破坏性影响的知识。详细介绍了用于激光损伤研究的实验装置。作为激光源，脉冲激光器和连续波（CW）激光器都被使用。激光诱导损伤阈值由单次激发法通过从脉冲到脉冲增加脉冲能量或在CW激光器的情况下通过增加激光功率来确定。此外，我们研究了激光诱导损伤图案的形态和破坏性的器件元件的数量对激光脉冲能量或激光功率的依赖性。除了单个像素的破坏之外，我们还观察到后遗症，例如传感器图像中持续的死列或死行像素。(C)作者。由SPIE在知识共享署名3.0未移植许可下发布。分发或复制本作品的全部或部分需要原始出版物的全部归属，包括其DOI。
The continuous development of laser systems toward more compact and efficient devices constitutes an increasing threat to electro-optical imaging sensors, such as complementary metal-oxide-semiconductors (CMOS) and charge-coupled devices. These types of electronic sensors are used in day-to-day life but also in military or civil security applications. In camera systems dedicated to specific tasks, micro-optoelectromechanical systems, such as a digital micromirror device (DMD), are part of the optical setup. In such systems, the DMD can be located at an intermediate focal plane of the optics and it is also susceptible to laser damage. The goal of our work is to enhance the knowledge of damaging effects on such devices exposed to laser light. The experimental setup for the investigation of laser-induced damage is described in detail. As laser sources, both pulsed lasers and continuous-wave (CW)-lasers are used. The laser-induced damage threshold is determined by the single-shot method by increasing the pulse energy from pulse to pulse or in the case of CW-lasers, by increasing the laser power. Furthermore, we investigate the morphology of laser-induced damage patterns and the dependence of the number of destructive device elements on the laser pulse energy or laser power. In addition to the destruction of single pixels, we observe aftereffects, such as persistent dead columns or rows of pixels in the sensor image. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.