Physical Sputtering of Solids at Ion Bombardment
Physical Sputtering of Solids at Ion Bombardment
复制标题
离子轰击下固体的物理溅射
DOI：
10.1007/978-1-4757-0067-1_8
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发表时间：
1986
期刊：
影响因子：
--
通讯作者：
R. Behrisch
中科院分区：
文献类型：
--
作者：
J. Roth;D. Post;R. Behrisch
概述了目前对物理溅射的认识，重点介绍了物理溅射在聚变堆技术中的应用。这决定了离子种类H、D、He、C、0和自离子，以及从溅射阈值到几keV的能量范围。此外，还尝试在理论不全面的情况下给出经验解析公式。最后，作为算例，计算了ASDEX中电荷交换壁溅射产生的杂质通量。
An outline is given on the current understanding of physical sputtering with emphasis of the use in fusion reactor technology. This determines the ion species H, D, He, C, 0 and self ions as well as the energy range from the sputtering threshold to several keV. Additionally an attempt is made to present empirical analytic formula where comprehensive theories do not exist. Finally, as an example, the impurity fluxes from charge exchange wall sputtering in ASDEX are calculated.