CMOS integration of inkjet-printed graphene for humidity sensing.
CMOS integration of inkjet-printed graphene for humidity sensing.
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DOI：
10.1038/srep17374
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发表时间：
2015-11-30
影响因子：
4.6
通讯作者：
Hasan T
中科院分区：
文献类型：
--
作者：
Santra S;Hu G;Howe RC;De Luca A;Ali SZ;Udrea F;Gardner JW;Ray SK;Guha PK;Hasan T
我们报告的集成喷墨打印石墨烯与CMOS微机电系统（MEMS）微热板的湿度传感。石墨烯墨水是使用聚乙烯吡咯烷酮（PVP）聚合物作为稳定剂通过在异丙醇（IPA）中的超声辅助液相剥离来生产的。我们配制了具有不同石墨烯浓度的墨水，然后通过喷墨印刷将其沉积在CMOS微热板上的预定义的叉指型金电极上。石墨烯薄片形成膨胀网络以使所得石墨烯-PVP薄膜导电，其在湿度存在下由于吸湿PVP主体的溶胀而变化。当传感器暴露于10- 80%的相对湿度时，我们观察到电阻的显著变化，随着油墨中石墨烯量的增加而增加灵敏度。我们的传感器在几周的时间内表现出出色的可重复性和稳定性。功能性石墨烯墨水在低成本CMOS平台上的位置特定沉积具有作为物联网的新一代微型低功率湿度传感器的大批量、经济制造和应用的潜力。
We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10–80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things.