Angle-resolved evolution of the composition of Cr–Al–C thin films deposited by sputtering of a compound target
Angle-resolved evolution of the composition of Cr–Al–C thin films deposited by sputtering of a compound target
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化合物靶溅射沉积的 Cr-Al-C 薄膜成分的角度分辨演化
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发表时间：
2013
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通讯作者：
J. Schneider
中科院分区：
文献类型：
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作者：
S. Mráz;J. Emmerlich;Felix Weyand;J. Schneider
通过磁控溅射化合物靶沉积的多元素薄膜的成分可能与靶的成分显著不同。不同元素的溅射发射特性(角度和能量分布)和溅射物质在气相中传输的差异被证明是造成这种现象的原因(Neidhardt等人，2008年，J.Appl。太棒了。104 063304)。研究了磁控溅射复合靶沉积的Cr-Al-C薄膜的成分随沉积气压的变化规律。压力在0.2~3.0帕之间变化，对应的压力距离乘积范围为1.4~21.0帕厘米。此外，在0°-67.5°范围内，研究了靶法向与靶基之间的夹角对成分的影响。实验数据与基于离子在物质中的动态输运(TRIDYN)和静态输运(TRIM)模拟的扩展蒙特卡罗模型在靶组分质量比高达4.3的三元化合物靶上观察到了很好的一致性。此外，还讨论了靶成分的表面结合能(SBE)对薄膜成分的影响。模拟表明，复合靶中碰撞级联内的散射而不是SBE决定了溅射组分的角分布函数的特征，从而决定了薄膜的成分。本文采用的扩展蒙特卡罗模型预测了当薄膜相对于衬底的压强距离乘积和角度取向不同时，化合物靶和沉积薄膜之间的成分变化。
The composition of multi-element thin films deposited by magnetron sputtering of a compound target may significantly differ from the target composition. Differences in the sputter emission characteristics (angle and energy distributions) and transport of the sputtered species through the gas phase for different elements were shown to be responsible for this phenomenon (Neidhardt et al 2008 J. Appl. Phys. 104 063304). The evolution of the composition of Cr–Al–C thin films deposited by magnetron sputtering of a compound target is investigated as a function of the deposition pressure. The pressure was varied from 0.2 to 3.0 Pa, corresponding to a pressure–distance product range 1.4–21.0 Pa cm. Additionally, the influence of the angle between the target normal and the line between the target and the substrate on the composition is investigated in the range 0°–67.5°. Good agreement between the experimental data and an extended Monte Carlo model based on dynamic (TRIDYN) and static transport of ions in matter (TRIM) simulations is observed for a ternary compound target with a mass ratio of the target constituents of up to 4.3. Furthermore, the influence of the surface binding energies (SBEs) of the target constituents on the thin-film composition is discussed. The simulations indicate that scattering within the collision cascades in a compound target rather than the SBEs determine the character of the angular distribution functions of the sputtered species and, consequently, the thin-film composition. The extended Monte Carlo model employed here predicts variations in composition between the compound target and the as-deposited thin films as the pressure–distance product and the angular orientation of the film with respect to the substrate are varied.