Structural Order of Nanocrystalline ZnO Films
Structural Order of Nanocrystalline ZnO Films
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DOI：
10.1021/jp9836426
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发表时间：
1999-05
影响因子：
3.3
通讯作者：
N. Tran;A. Hartmann;R. Lamb
中科院分区：
文献类型：
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作者：
N. Tran;A. Hartmann;R. Lamb
研究了单源化学气相沉积（SS-CVD）碱式醋酸锌Zn_4 O（CH_3COO）_6制备的纳米ZnO薄膜的长程有序和短程有序结构。在SS-CVD过程中添加低背景压力的H2O提供了通过控制膜内包藏的杂质来改变结构性质的机制。所得膜的结构可以从非晶（10原子）到非晶（10原子）变化。%杂质）到具有优选c轴取向的高度结晶（小于1 at. %杂质）。透射电子显微镜、X射线衍射和电子能谱测量被用来研究薄膜晶粒的结构，并解释观察到的杂质浓度和薄膜微晶尺寸（3 - 40 nm）之间的相关性。扩展的X射线吸收精细结构的研究结果表明，晶粒的取向（随机或c轴）是依赖于原子的短程结构特性。自织纹
Long- and short-range structural order of nanocrystalline ZnO films grown using single source chemical vapor deposition (SS-CVD) of basic zinc acetate Zn4O(CH3COO)6 have been investigated. The addition of a low background pressure of H2O during SS-CVD provides a mechanism for varying the structural properties through control of impurities occluded within the film. The structure of the resultant films can be varied from amorphous (10 at. % impurities) to highly crystalline with preferred c-axis orientation (less than 1 at. % impurities). Transmission electron microscopy, X-ray diffraction, and electron spectroscopy measurements have been used to investigate the structure of the film grains and to explain the observed correlation between impurity concentration and size of the film crystallites (3−40 nm). The results of extended X-ray absorption fine structure studies indicate that the orientation of the crystallites (random or c-axis) is dependent on the atomic short-range structural properties. Self-textur...