Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe
Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe
复制标题
功能梯度压电驱动多晶硅微悬臂梁探针的静态和动态行为研究
DOI：
10.1063/1.4945232
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
S. Parashar
中科院分区：
文献类型：
--
作者：
V. B. Pandey;S. Parashar
在本文中，提出了一种用于原子力显微镜的新型功能梯度压电（FGP）驱动多晶硅微悬臂梁探针。剪切压电系数 d15 的值远高于耦合系数 d31 和 d33，因此在本工作中利用 d15 效应驱动的微悬臂梁。材料特性通过简单的幂律在致动器的厚度方向上分级。使用 COMSOL Multiphysics®（版本 4.2）软件进行了三维有限元分析。对微悬臂梁探针进行了尖端偏转和自由振动分析。本文提出的结果将有助于微悬臂梁探针的设计及其随后在原子力显微镜中的应用。
In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d15 has much higher value than coupling coefficients d31 and d33, hence in the present work the micro cantilever beam actuated by d15 effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.