Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2
Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2
复制标题
Cu(C5HF6O2)2 聚焦电子束诱导柱状沉积物机械性能的剂量和能量依赖性
作者：
V. Friedli;I. Utke;Kristian Mølhave;J. Michler
Bending and vibration tests performed inside a scanning electron microscope were used to mechanically characterize high aspect pillars grown by focused electron-beam- (FEB) induced deposition from the precursor Cu(C5HF6O2)2. Supported by finite element (FE) analysis the Young’s modulus was determined from load–deflection measurements using cantilever-based force sensing and the material density from additional resonance vibration analysis. The pillar material consisted of a carbonaceous (C-, O-, F-, H-containing) matrix which embeds 5–10 at.% Cu deposited at 5 and 20 keV primary electron energy and 100 pA beam current, depending on primary electron energy. The Young’s moduli of the FEB deposits increased from 17 ± 6 to 25 ± 8 GPa with increasing electron dose. The density of the carbonaceous matrix shows a dependence on the primary electron energy: 1.2 ± 0.3 g cm−3 (5 keV) and 2.2 ± 0.5 g cm−3 (20 keV). At a given primary energy a correlation with the irradiation dose is found. Quality factors determined from the phase relation at resonance of the fundamental pillar vibration mode were in the range of 150–600 and correlated to the deposited irradiation energy.
