Growth of InGaSb Quantum Dot Structures on GaAs and Silicon Substrates

Growth of InGaSb Quantum Dot Structures on GaAs and Silicon Substrates
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在 GaAs 和硅衬底上生长 InGaSb 量子点结构

DOI:
10.1143/jjap.46.2401
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发表时间:
2007
影响因子:
1.5
通讯作者:
M. Tsuchiya
M. Tsuchiya
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
N. Yamamoto;K. Akahane;S. Gozu;A. Ueta;N. Ohtani;M. Tsuchiya

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提出了一种在GaAs和硅衬底上用分子束外延生长Sb基InGaSb量子点的方法。通过优化生长条件,我们成功地在两种衬底上制备了高质量和高密度(>1010/cm 2)的Sb基量子点结构。此外,使用嵌入GaAs基质中的Sb基量子点作为有源介质,我们在GaAs衬底上制造的光学微腔结构中展示了Sb基量子点在1.55 μm波长处的光发射。我们还讨论了在硅晶片上生长Sb基量子点,这可能成为硅光子学技术的有用材料。
We present a growth technique for InGaSb quantum dots (QDs) as Sb-based QD structures on GaAs and silicon substrates by molecular beam epitaxy. We successfully fabricated high-quality and high-density (>1010/cm2) Sb-based QD structures on both substrates by optimizing growth conditions. Additionally, using the Sb-based QDs embedded in a GaAs matrix as an active medium, we demonstrated optical emissions at a wavelength of 1.55-µm from the Sb-based QDs in an optical microcavity structure fabricated on the GaAs substrate. We also discuss the growth of the Sb-based QDs on a silicon wafer that may become useful materials for silicon photonics technology.
DOI: 10.1143/jjap.43.l1124
发表时间: 2004-08-15
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
影响因子: --
作者:
Otsubo, K;Hatori, N;Arakawa, Y
通讯作者: Arakawa, Y
DOI: 10.1063/1.92959
发表时间: 1982-01-01
影响因子: 4
作者:
ARAKAWA, Y;SAKAKI, H
通讯作者: SAKAKI, H