Evolution in X-ray analysis from micro to atomic scales in aberration-corrected scanning transmission electron microscopes
Evolution in X-ray analysis from micro to atomic scales in aberration-corrected scanning transmission electron microscopes
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DOI：
10.1093/jmicro/dfab026
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发表时间：
2021-07-15
期刊：
影响因子：
1.8
通讯作者：
Egerton, R. F.
中科院分区：
文献类型：
--
作者：
Watanabe, M.;Egerton, R. F.
X射线分析是从各种材料中提取定量信息的最可靠的方法之一，自从Raimond Castaing在70年前建立了分析电子诱导X射线信号用于材料表征的程序以来，X射线分析被广泛应用于各个领域。最近发展的像差校正技术（扫描）透射电子显微镜（S/TEM）提供了低于埃级的精细电子探针，使原子分辨率的X射线分析成为可能。此外，最新的硅漂移探测器允许复杂的探测器布置和新的配置设计，以最大限度地提高X射线信号的收集效率，这使得从单个原子中获取X射线信号变得可行。在这篇综述论文中，最新进展和优势，相关的S/TEM为基础的X射线分析将讨论：（i）在材料表征的量化进展，包括最近的应用轻元素分析，（ii）在原子分辨率分析的分析空间分辨率的进展和（iii）在分析灵敏度的进展，对单原子检测和分析材料。通过对电子在取向晶体样品中传播的多切片计算，结合X射线能谱模拟，对原子分辨分析和单原子分析进行了理论评价。
X-ray analysis is one of the most robust approaches to extract quantitative information from various materials and is widely used in various fields ever since Raimond Castaing established procedures to analyze electron-induced X-ray signals for materials characterization '70 years ago'. The recent development of aberration-correction technology in a (scanning) transmission electron microscopes (S/TEMs) offers refined electron probes below the angstrom level, making atomic-resolution X-ray analysis possible. In addition, the latest silicon drift detectors allow complex detector arrangements and new configurational designs to maximize the collection efficiency of X-ray signals, which make it feasible to acquire X-ray signals from single atoms. In this review paper, recent progress and advantages related to S/TEM-based X-ray analysis will be discussed: (i) progress in quantification for materials characterization including the recent applications to light element analysis, (ii) progress in analytical spatial resolution for atomic-resolution analysis and (iii) progress in analytical sensitivity toward single-atom detection and analysis in materials. Both atomic-resolution analysis and single-atom analysis are evaluated theoretically through multislice-based calculation for electron propagation in oriented crystalline specimen in combination with X-ray spectrum simulation.