High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration
High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration
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DOI：
10.1364/oe.25.013425
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发表时间：
2017-06-12
期刊：
影响因子：
3.8
通讯作者：
Piegari, Angela
中科院分区：
文献类型：
--
作者：
Hu, Guohang;He, Hongbo;Piegari, Angela
本文介绍了一种基于Otto-Bliokh组态的表面等离子体共振（SPR）椭圆偏振光谱仪。是为测量超薄薄膜的厚度和光学常数而研制的。该技术结合了表面等离子体的灵敏度与光学常数的可访问性和椭圆偏振术的其他优点。表面等离子体激元（SP）在被测样品中以全反射模式产生，SP在样品表面上的几何分布一方面受涂层厚度和光学性质的影响，另一方面受气隙厚度的影响。使用微米尺寸的束斑照射接触区来确保凸表面和样品之间的气隙厚度的纳米级控制。在可见光和近红外光谱范围内，获得了SPR引起的振幅和相位变化，以确定光学常数的色散和超薄层的厚度。提取的光学常数被认为是在良好的协议与使用TEM和XRR技术得到的结果。理论分析和实验结果表明，该方法具有较高的灵敏度和精密度，可用于金属和非金属镀层的分析。(C)2017美国光学学会
In this paper, a surface plasmon resonance (SPR) spectroscopic ellipsometry, based on Otto-Bliokh configuration. is developed for the measurement of thickness and optical constants of ultra-thin coatings. This technique combines sensitivity of surface plasmon with accessibility of optical constants and other advantages of ellipsometry. Surface plasmons (SP) are generated in the sample under test in total reflectance mode and SP geometric distribution over the sample surface is influenced by the coating thickness and optical properties on one hand, and by the air gap thickness on the other hand. Nanoscale control of the thickness of the air gap between a convex surface and the sample was assured using a micron-size beam spot irradiating the contact zone. The amplitude and phase change induced by SPR in the visible and near-infrared spectral range were obtained to determine the dispersion of optical constants and the thickness of the ultra-thin layer. The extracted optical constants were found to be in excellent agreement with the results obtained using TEM and XRR techniques. Both theoretical analysis and experimental results demonstrated high sensitivity and precision of the proposed technique for the analysis of coatings of both metals and dielectrics on metals. (C) 2017 Optical Society or America