Micromachined extrinsic Fabry-Perot cavity for low-frequency acoustic wave sensing
Micromachined extrinsic Fabry-Perot cavity for low-frequency acoustic wave sensing
复制标题
用于低频声波传感的微机械外在法布里-珀罗腔
DOI：
10.1364/oe.27.024300
复制
发表时间：
2019-08-19
期刊：
影响因子：
3.8
通讯作者：
Zhang, Jiangshan
中科院分区：
文献类型：
--
作者：
Fu, Xin;Lu, Ping;Zhang, Jiangshan
在这项工作中，我们展示了一种低频声传感器结构的基础上，非本征法布里-珀罗干涉仪（EFPI）腔。腔体是通过微机械加工技术在边长为4 mm、厚度为400 μ m的正方形硅衬底上制造的，这使得传感器的尺寸相对紧凑。在引入光纤的组装过程中，设计了一种D型陶瓷插芯，实现了开放式腔体结构，能够平衡腔体内外的环境压力，使传感器在某些恶劣的应用环境中具有抗强压力变化的潜力。在实验上，传感器对从0.1 Hz到250 Hz的低频声波的响应被测量和演示。实现了0.5 ~ 250 Hz的平坦响应区域，灵敏度波动为0.8 dB。对传感器进行了25 MPa耐压试验，并进行了展示，验证了开腔结构的功能。(C)根据OSA开放获取出版协议的条款，2019年美国光学学会
In this work we demonstrate a low-frequency acoustic sensor structure based on extrinsic Fabry-Perot interferometer (EFPI) cavity. The cavity is fabricated through micromachining techniques in a square silicon substrate with 4 mm side length and 400 mu m thickness, which gives the sensor relative compact size. In the assembling process of the lead-in fiber, a D-shaped ceramic ferrule is designed to achieve the open cavity structure, which can balance the environmental pressure inside and outside the cavity and thus giving the sensor potentials of resisting strong pressure variations in some harsh application environments. Experimentally, sensor response to low-frequency acoustic waves from 0.1 Hz to 250 Hz is measured and demonstrated. A flat response region between 0.5 Hz to 250 Hz with sensitivity fluctuation of 0.8 dB is realized. Pressure resistant test of 25 MPa is also conducted on the sensor and exhibited to prove the function of the open cavity structure. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement