High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
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DOI：
10.1063/1.2361160
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发表时间：
2006-11
影响因子：
3.2
通讯作者：
Y. Liu;Zhongwu Liu;C. Tan;C. Ong
中科院分区：
文献类型：
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作者：
Y. Liu;Zhongwu Liu;C. Tan;C. Ong
通过改变反应射频磁控溅射过程中氩气和氮气混合气体的流量，制备了不同氮含量的FeCoN软磁薄膜。结果表明，FeCoN薄膜的电阻率随氮含量的增加而增加，最高可达211 μΩ cm。当气体流量为7sccm时，薄膜的矫顽力较小，饱和磁化强度较大，具有最好的软磁性能。用高分辨透射电子显微镜观察了薄膜的微观结构，发现薄膜中存在具有很高饱和磁化强度的α″-FeCo相。的FeCoN薄膜的高频特性进行了实验表征和理论研究。用Hoffmann涟漪理论解释了强磁散薄膜的磁导率谱。结果表明，涟漪效应是导致薄膜大阻尼的主要原因，具有较大阻尼系数的薄膜具有较强的阻尼特性。
FeCoN soft magnetic thin films with various nitrogen contents were fabricated by varying the gas flow rates of the argon and nitrogen gas mixture used during reactive rf magnetron sputtering. It was found that the resistivity of FeCoN film increased up to 211 μΩ cm with increasing nitrogen content. The film produced at the gas flow rate of 7 sccm exhibited the best soft magnetic properties with small coercivity and relatively large saturation magnetization. The microstructure of the films was examined by high-resolution transmission electron microscopy and α″-FeCo phase with very high saturation magnetization was observed in the films. The high-frequency properties of the FeCoN thin films were experimentally characterized and theoretically examined. The Hoffmann’s ripple theory was used to explain the permeability spectra for the films with strong magnetization dispersion. We found that the ripple effect is responsible for the large damping in the films, and those films with larger coercivities have stron...