Ni-based composite microstructures fabricated by femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles
Ni-based composite microstructures fabricated by femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles
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DOI：
10.7567/jjap.56.06gn08
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发表时间：
2017-06-01
影响因子：
1.5
通讯作者：
Hata, Seiichi
中科院分区：
文献类型：
--
作者：
Tamura, Kenki;Mizoshiri, Mizue;Hata, Seiichi
采用飞秒激光还原烧结NiO/Cr混合纳米颗粒制备了镍基复合微图案。用聚焦飞秒激光脉冲照射含有乙二醇和聚乙烯吡咯烷酮的NiO/Cr混合纳米粒子溶液。X射线衍射分析表明，在大气条件下，激光扫描速度在5- 15 mm/s范围内，NiO纳米粒子被还原得很好。相比之下，在1 mm/s的激光扫描速度下形成包括NiO的微图案，表明还原的Ni通过过热而被再氧化。这些结果得到了能量色散X射线光谱分析和微图案的电阻率的支持。激光扫描速度对微图形中Ni、NiO、Cr2 O3和Ni-Cr等成分的影响很大。通过控制激光扫描速度，实现了由基片和固定在基片上的轴选择性加工铁磁自由微齿轮。镍基复合微结构的制备工艺对铁磁微器件的制备具有重要的指导意义。(C)2017日本应用物理学会
Ni-based composite micropatterns were fabricated by the femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles. A NiO/Cr mixed nanoparticle solution including ethylene glycol and polyvinylpyrrolidone was irradiated with focused femtosecond laser pulses. The X-ray diffraction spectra of the fabricated micropatterns indicated that NiO nanoparticles were well reduced under atmospheric conditions in the laser scanning speed range of 5-15mm/s. In contrast, micropatterns including NiO were formed at a laser scanning speed of 1mm/s, indicating that the reduced Ni was reoxidized by overheating. These results were supported by those of energy-dispersive X-ray spectrometry analysis and the electrical resistivity of the micropatterns. The compositions such as Ni, NiO, Cr2O3, and Ni-Cr in the fabricated micropatterns depended on laser scanning speed. The selective fabrication of a ferromagnetic free microgear from the substrate and an axis fixed on the substrate was demonstrated by controlling the laser scanning speed. The fabrication process for Ni-based composite microstructures is useful for the fabrication of ferromagnetic microdevices. (C) 2017 The Japan Society of Applied Physics