Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM
Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM
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DOI：
10.3139/146.110149
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发表时间：
2009-08-01
影响因子：
0.8
通讯作者：
Pippan, Reinhard
中科院分区：
文献类型：
--
作者：
Kiener, Daniel;Motz, Christian;Pippan, Reinhard
在微米范围内探测机械性能是当前材料科学研究的热点。采用聚焦离子束显微镜制作微型化试样，安装在扫描电镜上的压头驱动试样，记录试样变形过程中的载荷和位移数据。给出了小型化压缩、拉伸、弯曲实验以及新开发的弯曲疲劳和弯曲断裂实验的实例，证明了扫描电镜在小长度尺度下的原位力学测试的独特灵活性。
Probing mechanical proper-ties in the micrometer regime is of current interest in materials science. A focused ion beam microscope was employed to fabricate miniaturized specimens, while an indenter installed in a scanning electron microscope was utilized to actuate the samples and record the load and displacement data during the deformation. Examples for miniaturized compression, tension, bending, as well as newly developed bending fatigue and bending fracture experiments are presented, demonstrating the unique flexibility of in-situ mechanical testing in the scanning electron microscope at small length scales.