Seiichi HASEGAWA: "Control of preferential orientation in polycrystalline silicon films prepared by plasma-enhanced chemical vapor deposition" Journal of Electrochemical Society.
Seiichi HASEGAWA: "Control of preferential orientation in polycrystalline silicon films prepared by plasma-enhanced chemical vapor deposition" Journal of Electrochemical Society.
复制标题
Seiichi HASEGAWA:“等离子体增强化学气相沉积制备的多晶硅薄膜中择优取向的控制”电化学学会杂志。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: