Tiny, Light-Weight and Flexible Color Sensor by Combination of Se/Ga2O3 Photodiode Array and Fluidic-Printed RGB Filters
Tiny, Light-Weight and Flexible Color Sensor by Combination of Se/Ga2O3 Photodiode Array and Fluidic-Printed RGB Filters
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DOI：
10.1109/transducers.2019.8808666
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发表时间：
2019-06
期刊：
影响因子：
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通讯作者：
Y. Adachi;Taizou Kobayashi
中科院分区：
文献类型：
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作者：
Y. Adachi;Taizou Kobayashi
本文提出了一种由薄膜光电二极管阵列和透明聚酰亚胺（PI）膜上的RGB彩色滤光片组成的柔性颜色传感器。p-Se/n-Ga 2 O 3异质结光电二极管阵列可以通过来自透明PI膜的背面的光照射通过RGB滤光片来检测对应于红色、绿色和蓝色（RGB）光谱分布的光强度。所提出的颜色传感器具有微小和灵活的特征，可以附着在甚至非平坦表面上，例如圆柱形管或人类手指的皮肤。为了实现柔性颜色传感器，成功地开发了薄膜生长工艺和滤色器的流体印刷技术的组合。
This paper presents a flexible color sensor composed of thin film photodiode array and RGB color filters on a transparent polyimide (PI) film. A p-Se/n-Ga2O3 heterojunction photodiode array can detect light intensities corresponding to red, green and blue (RGB) spectral distribution by light illumination from backside of a transparent PI film through RGB filters. The proposed color sensor with tiny and flexible features can be attached onto even non-flat surface such as cylindrical tubes or skin of human fingers. To realize flexible color sensor, a combination of thin film growth processes and fluidic printing technology of color filters was successfully developed.