Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism
Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism
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DOI：
10.1016/j.precisioneng.2004.02.003
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发表时间：
2004-10-01
影响因子：
3.6
通讯作者：
Anderson, G
中科院分区：
文献类型：
--
作者：
Culpepper, ML;Anderson, G
本文提出了一种新型的、低成本的、采用电磁驱动的六轴柔性机构的纳米机械臂设计。该机构的单片平面几何结构很容易通过平面制造工艺制造，实现紧凑的包装，并结合了一个柔性机构，以实现小传动比。该机械手容忍1毫米执行机构错位，小于0.1%的全尺寸位置误差。在100 nm x 100 nm x 100 nm的工作体积上的测量显示分辨率优于我们的5 nm测量能力，开环寄生误差小于5 nm。测量超过100 μ m x 100 μ m x 100 μ m的工作体积显示开环误差小于0.2%满量程。该机构的等边对称和平面几何结构使得在30分钟的启动时间内，可以将位置和方向上的热漂移限制在23 nm以下和4 murad以下。这个纳米操纵器的造价为2000美元（不包括电子设备），被用作超精密光纤对准器。(C) 2004爱思唯尔公司版权所有。
This paper presents the design of a novel, low-cost nano-manipulator which uses a six-axis compliant mechanism which is driven by electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated via planar manufacturing processes, enables compact packaging and incorporates a flexure mechanism for achieving small transmission ratios. The manipulator tolerates I mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100 nm x 100 nm x 100 nm work volume show resolution better than our measurement capability of 5 nm and open-loop parasitic errors less than 5 nm. Measurements over a 100 mum x 100 mum x 100 mum work volume show open loop errors less than 0.2% full-scale. The mechanism's equilateral symmetry and planar geometry make it possible to limit thermal drift in position and orientation to less than 23 nm and 4 murad over a 30 min start up period. The nano-manipulator, built at US$ 2000 cost (excludes electronics), is used as an ultra-precision fiber optic aligner. (C) 2004 Elsevier Inc. All rights reserved.