A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling
A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling
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一种新型 MEMS 阻抗调谐器，同时针对最大阻抗范围和功率处理进行了优化
DOI：
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发表时间：
2005
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通讯作者：
D. Peroulis
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作者：
Yumin Lu;L. Katehi;D. Peroulis
本文介绍了一种用于开发微波 MEMS 阻抗调谐器的新颖设计技术。与现有设计不同，我们同时优化调谐器的阻抗覆盖范围和功率处理能力。这使得调谐器可以用于现实生活中的负载牵引系统，其中功率处理与阻抗调谐同样重要。我们利用非接触式 MEMS 变容二极管进一步提高了功率处理能力，该变容二极管能够可靠地处理超过 3.5 W 的功率。这些原理通过 30 GHz 调谐器得到了证明，该调谐器具有非常宽的阻抗调谐范围，并且在可提供的功率方面提高了 4.5 倍（与传统 MEMS 设计相比）。
This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equally important to impedance tuning. We further increase the power handling by utilizing contact-less MEMS varactors that can reliably handle more than 3.5 W of power. These principles are demonstrated with a 30 GHz tuner that exhibits very wide impedance tuning and an improvement of 4.5 times (compared to conventional MEMS designs) in terms of the power it can deliver.