Watt-Class Green (530nm) and Blue (465nm) Laser Diodes
Watt-Class Green (530nm) and Blue (465nm) Laser Diodes
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DOI：
10.1002/pssa.201700513
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发表时间：
2018-05-23
影响因子：
2
通讯作者：
Narui, Hironobu
中科院分区：
文献类型：
--
作者：
Murayama, Masahiro;Nakayama, Yusuke;Narui, Hironobu
在本研究中，我们分别在自支撑半极性{2021}氮化镓及传统c面氮化镓基板上制作出瓦级绿色及蓝色雷射二极体。虽然几个研究小组最近已经在半极性GaN衬底上开发了绿色激光二极管，与c面GaN相比，其在InGaN有源区中具有较弱的压电场和较高的铟均匀性，但尚未实现瓦级输出功率。利用{202}面成功地制备出了第一个瓦级的530 nm绿色激光器，并获得了超过2 W的最大输出功率，这是目前所报道的GaN基绿色激光器的最高输出功率。在连续波操作下，在1.2A的电流下实现了17.5%的壁插效率，这对应于约1 W的光输出，并且是迄今为止报道的最高值。此外，在常规c面GaN衬底上成功制备了高功率、高效率的465 nm蓝光激光二极管。在3.0A电流下，连续波工作时，输出功率为5.2W，效率为37.0%。这些激光二极管是满足ITU-R建议BT.2020的未来激光显示应用的有前途的光源。
In this research, watt-class green and blue laser diodes, which are fabricated on free-standing semipolar {2021} GaN and conventional c-plane GaN substrates, respectively are developed. Although several research groups have recently developed green laser diodes on semipolar GaN substrates, which have weaker piezoelectric fields and higher indium homogeneity in InGaN active regions compared to c-plane GaN, watt-level output power has yet to be achieved. By utilizing the {202} plane, the first watt-class green lasers at 530nm is successfully fabricated, and achieve maximum output powers in excess of 2W, which to the best of our knowledge is the highest value reported for any GaN-based green laser diode. A wall-plug efficiency of 17.5% is realized at a current of 1.2A under continuous-wave operation, which corresponds to an optical output of approximately 1W and is the highest value reported to date. In addition, high-power and high-efficiency blue laser diodes at 465nm are successfully fabricated on conventional c-plane GaN substrates. The output power and wall-plug efficiency are 5.2W and 37.0%, respectively, at a current of 3.0A under continuous-wave operation. These laser diodes are promising light sources meeting the ITU-R Recommendation BT.2020 for future laser display applications.