Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
复制标题
纳米操纵原子力显微镜主动探针精密位置控制器的设计与实现
DOI：
10.1007/s11434-008-0273-x
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发表时间：
2008-07
期刊：
影响因子：
--
通讯作者：
Zhang JiangBo
中科院分区：
文献类型：
--
作者：
Hao LiNa;Xi Ning;Zhang JiangBo
基于AFM的纳米操纵的效率和精度仍然是主要的问题，需要解决的，由于非线性和不确定性，如漂移，蠕变，滞后等，由操纵力引起的杠杆的变形也是最主要的非线性和不确定性的因素之一。它导致尖端位置的精确控制困难，并导致尖端错过物体的位置。为了解决这个问题，传统的方法是使用刚性悬臂梁。然而，这将显著降低操纵期间力感测的灵敏度，这对于实现有效和可靠的纳米操纵至关重要。本文采用一种主动式AFM探针，通过直接控制悬臂梁的刚度或柔性来解决这一问题。基于Euller-Bernoulli模型，设计了一种基于POF（Periodic-Output-Feedback）规律的主动测头控制器。仿真和实验结果表明，该理论模型和POF控制器适用于纳米操作的精确位置控制。
Efficiency and accuracy of AFM-based nanomanipulation are still major problems to be solved, due to the nonlinearities and uncertainties, such as drift, creep, hysteresis, etc. The deformation of cantilevers caused by manipulation force is also one of the most major factors of nonlinearities and uncertainties. It causes difficulties in precise control of the tip position and causes the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of force sensing during manipulation, which is essential for achieving an efficient and reliable nanomanipulation. In this paper, a kind of active AFM probe has been used to solve this problem by directly controlling the cantilever’s flexibility or rigidity during manipulation. Based on Euller-Bernoulli Model, a kind of controller of the active probe employing Periodic-Output-Feedback (POF) law is implemented. The results of simulation and experiments have demonstrated that this theoretical model and POF controller are suitable for precise position control of nanomanipulation.
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DOI：
10.1007/s003390050717
发表时间：
1998-02
期刊：
Applied Physics A
影响因子：
--
作者：
I. Zergioti;S. Mailis;N. Vainos;P. Papakonstantinou;C. Kalpouzos;C. Grigoropoulos;C. Fotakis
通讯作者：
I. Zergioti;S. Mailis;N. Vainos;P. Papakonstantinou;C. Kalpouzos;C. Grigoropoulos;C. Fotakis
DOI：
10.1007/3-540-28087-1
发表时间：
2014
期刊：
--
影响因子：
--
作者：
A. Prakash
通讯作者：
A. Prakash
DOI：
10.1243/095440603762826503
发表时间：
2003-02
期刊：
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
影响因子：
--
作者：
A. Singh;Y. Ram
通讯作者：
A. Singh;Y. Ram
影响因子：
2.6
作者：
BAILEY, T;HUBBARD, JE
通讯作者：
HUBBARD, JE
DOI：
10.1115/1.3625222
发表时间：
1965
期刊：
--
影响因子：
--
作者：
E. Volterra;E. C. Zachmanoglou;H. Kolsky
通讯作者：
E. Volterra;E. C. Zachmanoglou;H. Kolsky