Laser-induced cavitation bubbles for cleaning of solid surfaces

Laser-induced cavitation bubbles for cleaning of solid surfaces
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DOI:
10.1063/1.1650531
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发表时间:
2004-03-15
影响因子:
3.2
通讯作者:
Chong, TC
Chong, TC
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Song, WD;Hong, MH;Chong, TC

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当高功率激光束聚焦到液体中时,会产生激波发射和空化气泡。在液体中插入刚性衬底后,由于比约克尼斯引力,气泡向衬底移动。由于气泡与衬底和/或气泡与无表面的相互作用,在气泡崩塌时形成高速液体射流,在衬底附近的气泡崩塌瞬间产生崩塌激波。这些激波和液体射流诱导作用在基材上的巨大力将颗粒从基材上移除。对于距离激光聚焦点几毫米的基板,坍塌激波和液体射流对颗粒的去除起关键作用。清洗效率随激光通量的增加而增加,随基材表面与激光束焦点距离或液面深度的增加而降低。在气泡靠近衬底和液面边界的情况下,气泡的内爆将产生斜向衬底表面的激波和液体射流,作用力的平行分量和垂直分量作用在颗粒上。这些倾斜的液体射流和冲击波使清洗效率很高。用液体,如酒精和商业清洗液作为周围介质,而不是空气或真空,可以降低附着力,提高清洁效率。(C) 2004年美国物理研究所。
When a high-power laser beam is focused into liquid, it results in a shock wave emission and cavitation bubble generation. Upon inserting a rigid substrate into the liquid, the bubbles migrate towards the substrate due to the Bjerknes attractive force. Due to bubble-substrate and/or bubble-free-surface interaction, a high-speed liquid jet is formed during bubble collapse, and a collapse shock wave is generated at the moment of bubble collapse near the substrate. These shock waves and liquid jet induce large forces acting on the substrate to remove particles from it. For a substrate several millimeters away from the laser focus point, the collapse shock wave and liquid jet play key roles in removal of particles. The cleaning efficiency increases with an increase of laser fluence and decreases with an increase of distance between substrate surface and laser beam focus point or depth below liquid surface. In a case of bubbles close to substrate and liquid-surface boundaries, implosion of the bubbles will give rise to shock waves and liquid jets oblique to the substrate surface with the parallel and perpendicular components of the forces onto the particles. These oblique liquid jets and shock waves result in high cleaning efficiency. A liquid, such as alcohol and commercial washing solution, as the surrounding medium, rather than air or vacuum, can reduce adhesion force and enhance cleaning efficiency. (C) 2004 American Institute of Physics.