In Situ Measurement of Carbon Nanotube Growth Kinetics in a Rapid Thermal Chemical Vapor Deposition Reactor With Multizone Infrared Heating
In Situ Measurement of Carbon Nanotube Growth Kinetics in a Rapid Thermal Chemical Vapor Deposition Reactor With Multizone Infrared Heating
复制标题
多区红外加热快速热化学气相沉积反应器中碳纳米管生长动力学的原位测量
DOI：
10.1115/1.4046033
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发表时间：
2020
影响因子：
1
通讯作者：
Bedewy, Mostafa
中科院分区：
文献类型：
--
作者：
Abdulhafez, Moataz;Lee, Jaegeun;Bedewy, Mostafa
通过化学气相沉积 (CVD) 了解和控制垂直排列碳纳米管 (VACNT) 森林的生长对于释放其作为下一代能源和质量运输设备候选材料的潜力至关重要。碳纳米管制造的这些进步需要开发能够探究碳纳米管如何生长、相互作用和自组装的原位表征技术。在这里，我们提出了一种实时监测 VACNT 森林高度动力学的技术，该技术应用于用于 VACNT CVD 的独特定制设计的快速热处理 (RTP) 反应器。虽然多个红外加热灯的集成能够在反应器内部创建设计的时空温度分布，但它们对原位测量提出了挑战。因此，我们的方法依赖于对比度调整的摄像和图像处理，并结合使用具有大景深的 3D 光学显微镜进行校准。我们的工作能够可靠地测量 VACNT 生长速率和催化寿命，这是使用异位方法无法测量的。
Understanding and controlling the growth of vertically aligned carbon nanotube (VACNT) forests by chemical vapor deposition (CVD) is essential for unlocking their potential as candidate materials for next generation energy and mass transport devices. These advances in CNT manufacturing require developing in situ characterization techniques capable of interrogating how CNTs grow, interact, and self-assemble. Here we present a technique for real-time monitoring of VACNT forest height kinetics applied to a unique custom designed rapid thermal processing (RTP) reactor for CVD of VACNTs. While the integration of multiple infrared heating lamps enables creating designed spatiotemporal temperature profiles inside the reactor, they pose challenges for in situ measurements. Hence, our approach relies on contrast-adjusted videography and image processing, combined with calibration using 3D optical microscopy with large depth-of-field. Our work enables reliably measuring VACNT growth rates and catalytic lifetimes, which are not possible to measure using ex situ methods.
多区快速热处理克服化学气相沉积碳纳米管制造中的挑战
DOI：
10.1115/msec2019-2847
发表时间：
2019
期刊：
2019 ASME Manufacturing Science and Engineering Conference (MSEC
影响因子：
--
作者：
Lee, Jaegeun;Abdulhafez, Moataz;Bedewy, Mostafa
通讯作者：
Bedewy, Mostafa