MEMS for automotive and consumer electronics
MEMS for automotive and consumer electronics
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DOI：
10.1109/essderc.2013.6818809
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发表时间：
2013-09
期刊：
影响因子：
--
通讯作者：
S. Finkbeiner
中科院分区：
文献类型：
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作者：
S. Finkbeiner
微机电系统（MEMS）检测环境条件并向电子控制系统提供输入。MEMS是通常将微小机械结构与电子电路联合收割机组合的微型系统。典型的MEMS结构具有几微米的尺寸。MEMS传感器使系统对人类需求的反应更加智能，精确，并且比人类可能的反应速度快得多。如今，MEMS传感器几乎可以在每一辆汽车、智能手机或笔记本电脑中找到。由于不断的产品创新，传感器在汽车和消费电子产品中的应用越来越多。根据IHS iSuppli的数据，2011年微机械传感器的销量为43亿，2015年增长到98亿，每年增长23%。只有不断努力提高性能并降低传感器的尺寸、功耗和成本，才有可能实现这些增长率。从历史上看，这些改进导致了MEMS工业大规模生产的突破。这是在过去20年中通过密集和成功的开发活动以及数十亿传感器的批量生产经验实现的。从那时起，MEMS技术使加速度计、陀螺仪、地磁传感器、气压传感器、喷墨喷嘴或微镜成为可能，用于数字光处理（DLP）投影系统。推动消费电子产品未来应用的将是人机界面（HMI）、增强现实（AR）和室内导航。
Micro-Electro-Mechanical Systems (MEMS) are sensing the environmental conditions and give input to electronic control systems. MEMS are miniature systems which usually combine tiny mechanical structures with electronic circuits. Typical MEMS structures have a size of a few micrometers. MEMS sensors make system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Today MEMS sensors can be found in nearly every motor vehicle, smart phone or laptop. Due to continuous product innovations, the sensors find their way into more and more applications in automotive and consumer electronics. According to IHS iSuppli an amount of 4.3 billion micromechanical sensors were sold in 2011 with an impressive increase to 9.8 billion sensors in 2015 - a growth rate of 23% per year. These growth rates are only possible with continuous efforts to improve the performance and to decrease the size, power consumption and costs of the sensors. Historically, these improvements have lead to the breakthrough to industrial mass production for MEMS. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. Since then, MEMS technology has enabled accelerometers, gyroscopes, geomagnetic sensors, barometric pressure sensors, inkjet nozzles or micro-mirrors for Digital-Light Processing (DLP) projection systems. Driving future applications in consumer electronics will be Human-Machine Interfaces (HMI), Augmented Reality (AR) and in-door navigation.