An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor
An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor
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DOI：
10.1016/j.precisioneng.2014.08.001
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发表时间：
2015-01-01
影响因子：
3.6
通讯作者：
Ju, Bing-Feng
中科院分区：
文献类型：
--
作者：
Chen, Yuan-Liu;Wang, Shu;Ju, Bing-Feng
本文提出了一种在线测量方法，它是能够进行实时位置识别和在机轮廓特征的微缺陷在有缺陷的微结构，通过使用快速工具伺服与力传感器（FS-FTS）在超精密车床。FS-FTS在切削微结构的过程中捕获实时推力图，以指示相对于车床坐标系中的切削刀具位置的切削状态。基于推力图，根据与缺陷的出现相关联的图中的异常变化的位置，真实的识别缺陷的位置。然后，通过采用力控制的切削工具作为测量探针来测量有缺陷的微结构的截面轮廓来进行缺陷的表征。通过对辊模外表面微结构缺陷的在线检测与修复实验，验证了该方法的可行性。(C)2014爱思唯尔公司All rights reserved.
This paper presents an in-process measurement method, which is capable of conducting real-time position identification and on-machine profile characterization of micro-defects in defective microstructures by using a fast tool servo with a force sensor (FS-FTS) on an ultra-precision lathe. A real-time thrust force map is captured in the process of cutting the microstructures by the FS-FTS to indicate the cutting status with respect to the cutting tool position in the coordinate system of the lathe. Based on the thrust force map, the positions of the defects are identified in real time from the locations of the abnormal variations in the map associated with the occurrences of the defects. Characterization of the defects is then conducted by employing the force-controlled cutting tool as the measuring probe to measure the sectional profiles of the defective microstructures. The identified positions and the characterized profiles of the defects are then fed back to carry out the repair fabrication of the defective microstructures with an accurate tool path. Experiments of in-process detection and repair of the micro-defects in the microstructures over the outer surface of a roll mold were carried out to confirm the feasibility of the proposed method. (C) 2014 Elsevier Inc. All rights reserved.