Structure, optical, and magnetic properties of facing-target reactive sputtered Ti1-xFexO2-δ films
Structure, optical, and magnetic properties of facing-target reactive sputtered Ti1-xFexO2-δ films
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DOI：
10.1116/1.3168557
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发表时间：
2009-08
期刊：
影响因子：
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通讯作者：
Y. Jiang;W. Mi;E. Jiang;H. Bai
中科院分区：
文献类型：
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作者：
Y. Jiang;W. Mi;E. Jiang;H. Bai
研究了表面靶反应溅射制备的锐钛矿Ti1−xFexO2−δ薄膜的结构、光学和磁性能。结构分析表明，薄膜中不存在杂质相，当Fe含量x为0.017时，薄膜的晶粒尺寸达到最大。Ti1−xFexO2−δ薄膜的光学带隙随x的增加而减小。光致发光（PL）光谱显示直接和间接的带间跃迁共存，间接辐射复合可以看作是一个光子和两个声子耦合过程。由于氧空位的存在，Ti1−xFexO2−δ薄膜表现出室温铁磁性，薄膜的折射率随x的增加而增加。
Structure, optical, and magnetic properties of the anatase Ti1−xFexO2−δ films fabricated by facing-target reactive sputtering were investigated. Structural analyses indicate that there are no impurity phases in the films and the grain size reaches maximum when Fe content x is 0.017. The optical band gap of the Ti1−xFexO2−δ films decreases with the increasing x. Photoluminescence (PL) spectra show that direct and indirect band-to-band transitions coexist, and the indirect radiative recombination can be regarded as a one photon and two phonon coupling courses. The PL intensity due to oxygen vacancies enhances and the refractive index of the fims increases with the increasing x. The Ti1−xFexO2−δ films exhibit room-temperature ferromagnetism due to the oxygen vacancies.