Electronic Characterization of Interface between Si Substrate and Cu-Based Metal Paste on an Atomic Scale using KFM
Electronic Characterization of Interface between Si Substrate and Cu-Based Metal Paste on an Atomic Scale using KFM
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使用 KFM 在原子尺度上对硅基板和铜基金属浆料之间的界面进行电子表征
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
Itaru Kamiya and Yoshio Oshita
中科院分区:
文献类型:
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作者:
Fumihiko Yamada;Manabu Yoshida;Uichi Itoh;Isao Sumita;Itaru Kamiya and Yoshio Oshita