Shigeki Saito, et al.: "Micro-object Pick and Place Operation under SEM based on Micro-physics"Journal of Robotics and Mechatronics. 14・3(in press). (2002)
Shigeki Saito, et al.: "Micro-object Pick and Place Operation under SEM based on Micro-physics"Journal of Robotics and Mechatronics. 14・3(in press). (2002)
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Shigeki Saito 等:“基于微观物理学的 SEM 下的微型物体拾取和放置操作”机器人学报和机电一体化杂志 14・3(出版中)。
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