Katsuya ABE: "Characterization of Hydrogen in Epitaxial Silicon Films Grown at Very Low Temperatures" Jpn.J.Appl.Phys.37・3B. 1202-1205 (1998)
Katsuya ABE: "Characterization of Hydrogen in Epitaxial Silicon Films Grown at Very Low Temperatures" Jpn.J.Appl.Phys.37・3B. 1202-1205 (1998)
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Katsuya ABE:“极低温度下生长的外延硅膜中氢的特性”Jpn.J.Appl.Phys.37・3B 1202-1205 (1998)。
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