Sub‐100 nm lines produced by direct laser ablation in polyimide
Sub‐100 nm lines produced by direct laser ablation in polyimide
复制标题
聚酰亚胺中直接激光烧蚀产生的亚 100 nm 线
DOI：
10.1063/1.104778
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发表时间：
1991
影响因子：
4
通讯作者：
Z. Bor
中科院分区：
文献类型：
--
作者：
H. Phillips;D. Callahan;R. Sauerbrey;G. Szabó;Z. Bor
用干涉技术在聚酰亚胺上用KrF激光直接烧蚀制备了周期为167 nm、线宽为35 ~ 100 nm的周期线结构。由于烧蚀是一个非线性过程，分辨率可以超过预期的波长和数值孔径的系统和线宽可以通过改变激光能量密度控制。这种外部产生的167 nm的周期防止了由于辐射残余物而导致的周期性表面结构的自发生长。
Periodic line structures with a period of 167 nm and linewidths varying from 35 to 100 nm have been produced on polyimide by direct ablation with a KrF laser using an interferometric technique. Since ablation is a nonlinear process, the resolution can exceed that expected from the wavelength and numerical aperture of the system and the linewidth can be controlled by varying the laser fluence. This externally generated period of 167 nm prevents the spontaneous growth of periodic surface structures due to radiation remnants.