Diagnosis of high-intensity pulsed heavy ion beam generated by a novel magnetically insulated diode with gas puff plasma gun.
Diagnosis of high-intensity pulsed heavy ion beam generated by a novel magnetically insulated diode with gas puff plasma gun.
复制标题
DOI：
10.1063/1.2999904
复制
发表时间：
2008-10
期刊：
影响因子：
--
通讯作者：
H. Ito;H. Miyake;K. Masugata
中科院分区：
文献类型：
--
作者：
H. Ito;H. Miyake;K. Masugata
强流脉冲重离子束有望应用于材料表面改性和离子注入等领域。对于这些应用，产生具有各种离子种类的高纯度离子束是非常重要的。为此，我们研制了一种新型的磁绝缘离子二极管与喷气等离子体枪的主动离子源。当离子二极管在约190 kV的二极管电压、约15 kA的二极管电流和约100 ns的脉冲持续时间下操作时，在距阳极下游50 mm处获得离子电流密度为54 A/cm（2）的离子束。通过使用汤姆逊抛物线光谱仪评价离子束的离子种类和能谱，确认离子束由能量为100-400 keV的氮离子（N（+）和N（2+））和能量为90-200 keV的质子杂质组成。光束的纯度被评估为94%。利用研制的离子二极管系统成功地获得了高纯脉冲氮离子束。
Intense pulsed heavy ion beam is expected to be applied to materials processing including surface modification and ion implantation. For those applications, it is very important to generate high-purity ion beams with various ion species. For this purpose, we have developed a new type of a magnetically insulated ion diode with an active ion source of a gas puff plasma gun. When the ion diode was operated at a diode voltage of about 190 kV, a diode current of about 15 kA, and a pulse duration of about 100 ns, the ion beam with an ion current density of 54 A/cm(2) was obtained at 50 mm downstream from the anode. By evaluating the ion species and the energy spectrum of the ion beam via a Thomson parabola spectrometer, it was confirmed that the ion beam consists of nitrogen ions (N(+) and N(2+)) of energy of 100-400 keV and the proton impurities of energy of 90-200 keV. The purity of the beam was evaluated to be 94%. The high-purity pulsed nitrogen ion beam was successfully obtained by the developed ion diode system.