MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors-Recent Improvements and Comparison.
MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors-Recent Improvements and Comparison.
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DOI：
10.3390/s17030567
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发表时间：
2017-03-11
期刊：
影响因子：
--
通讯作者：
Zimmermann S
中科院分区：
文献类型：
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作者：
Deppe O;Dorner G;König S;Martin T;Voigt S;Zimmermann S
在下面的文章中，我们提出了一个由应用和客户需求驱动的用于导航目的的惯性传感器的行业前景。微机电系统（MEMS）惯性传感器已经彻底改变了消费者、汽车和工业应用，并且已经开始以批量生产规模满足混合导航系统的高端战术级性能要求。另一方面，光纤陀螺仪（FOG）技术被进一步推向近导航级性能区域和更远的区域。每种技术都有其特殊的优点和缺点，使其或多或少适合特定的应用。在我们的概述文件中，我们介绍了NG LITEF在战术和导航级MEMS加速度计、MEMS陀螺仪和光纤陀螺仪方面的最新改进，这些改进是基于我们在该领域的长期经验。我们演示了如何提高加速度计的性能，从湿蚀刻切换到深反应离子蚀刻（DRIE）技术。对于MEMS陀螺仪，我们展示了优于1°/h的系列生产设备是触手可及的，对于FOG，我们介绍了如何通过信号处理克服噪声性能的限制。本文还对各种技术进行了比较，强调了它们对不同导航应用的适用性，从而为系统工程师提供指导。
In the following paper, we present an industry perspective of inertial sensors for navigation purposes driven by applications and customer needs. Microelectromechanical system (MEMS) inertial sensors have revolutionized consumer, automotive, and industrial applications and they have started to fulfill the high end tactical grade performance requirements of hybrid navigation systems on a series production scale. The Fiber Optic Gyroscope (FOG) technology, on the other hand, is further pushed into the near navigation grade performance region and beyond. Each technology has its special pros and cons making it more or less suitable for specific applications. In our overview paper, we present latest improvements at NG LITEF in tactical and navigation grade MEMS accelerometers, MEMS gyroscopes, and Fiber Optic Gyroscopes, based on our long-term experience in the field. We demonstrate how accelerometer performance has improved by switching from wet etching to deep reactive ion etching (DRIE) technology. For MEMS gyroscopes, we show that better than 1°/h series production devices are within reach, and for FOGs we present how limitations in noise performance were overcome by signal processing. The paper also intends a comparison of the different technologies, emphasizing suitability for different navigation applications, thus providing guidance to system engineers.