Sung-Soo Lee: "Properties of Amorphous Carbon Films Prepared by RF Plasma CVD in CH4/Ar/H2 Gas System" Proc.9th Symposium on Plasma Science for Materials. 21-26 (1996)

Sung-Soo Lee：“在 CH4/Ar/H2 气体系统中通过射频等离子体 CVD 制备的非晶碳薄膜的性能”Proc.9th Symposium on Plasma Science for Materials。