Wafer-scale micro-optics fabrication
Wafer-scale micro-optics fabrication
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DOI：
10.1515/aot-2012-0013
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发表时间：
2012-07
期刊：
影响因子：
--
通讯作者：
R. Voelkel
中科院分区：
文献类型：
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作者：
R. Voelkel
摘要微光学是当今许多产品和应用不可或缺的关键使能技术。也许最负盛名的例子是高端DUV光刻步进机中使用的衍射光成形元件。高效的折射和衍射微光学元件用于精确的光束和光瞳成形。微光学对减少投影光刻中的像差和衍射效应产生了重大影响，在过去的十年中，使分辨率从250 nm提高到45 nm。微光学在医疗设备（内窥镜、眼科）、所有基于激光的设备和光纤通信网络中也发挥着决定性作用，为我们的家庭带来了高速互联网。即使是我们现代的智能手机也包含各种微光学元件。例如，LED闪光灯整形元件、辅助摄像头、环境光和接近传感器。只要涉及到光，微光学就有机会进一步简化设备，提高其性能，或降低制造和包装成本。晶圆级微光学器件制造基于半导体工业建立的技术。成千上万的元件在一个晶圆上并行制造。本文综述了圆片级微光学技术的主要步骤和发明。本文综述了该器件的制作、测试和封装技术的最新进展。
Abstract Micro-optics is an indispensable key enabling technology for many products and applications today. Probably the most prestigious examples are the diffractive light shaping elements used in high-end DUV lithography steppers. Highly-efficient refractive and diffractive micro-optical elements are used for precise beam and pupil shaping. Micro-optics had a major impact on the reduction of aberrations and diffraction effects in projection lithography, allowing a resolution enhancement from 250 nm to 45 nm within the past decade. Micro-optics also plays a decisive role in medical devices (endoscopes, ophthalmology), in all laser-based devices and fiber communication networks, bringing high-speed internet to our homes. Even our modern smart phones contain a variety of micro-optical elements. For example, LED flash light shaping elements, the secondary camera, ambient light and proximity sensors. Wherever light is involved, micro-optics offers the chance to further miniaturize a device, to improve its performance, or to reduce manufacturing and packaging costs. Wafer-scale micro-optics fabrication is based on technology established by the semiconductor industry. Thousands of components are fabricated in parallel on a wafer. This review paper recapitulates major steps and inventions in wafer-scale micro-optics technology. The state-of-the-art of fabrication, testing and packaging technology is summarized.