Designing an Excellent Deep-Ultraviolet Birefringent Material for Light Polarization
Designing an Excellent Deep-Ultraviolet Birefringent Material for Light Polarization
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DOI：
10.1021/jacs.8b10009
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发表时间：
2018-11-28
影响因子：
15
通讯作者：
Pan, Shilie
中科院分区：
文献类型：
--
作者：
Chen, Xinglong;Zhang, Bingbing;Pan, Shilie
由于双折射材料在产生和控制偏振光方面的重要作用，它们被广泛应用于各种先进的光学系统中，这反过来又影响到广泛的、快速增长的科学和技术应用。目前，由于MgF2的双折射较小以及α-BaB2O4(α-BBO)的透过率较低，阻碍了其在200 nm以下波长的有效应用。例如，深紫外(DUV)光刻迫切需要用于光偏振的深紫外双折射材料。在这里，我们根据计算和实验结果证明，在Ca(BO2)(2)中发现的角连平面SP(2)杂化BO_3基团的平行链有效地产生了大的双折射。与所有已报道的硼酸盐双折射材料相比，Ca(BO2)(2)实现了三个重要的最佳性能，包括最短的UV截止边缘、最大的双折射和最高的激光诱导损伤阈值(LIDT)。在Ca(BO_2)(2)单晶的基础上，实现了DUV-GRAN偏振器，并且比用市售的MgF_2制成的偏振器效率更高。
Owing to their vital role in creating and controlling polarized light, birefringent materials are used extensively in various advanced optical systems which in turn impact a large, rapidly increasing range of applications in science and technology. Currently, the fairly small birefringence of MgF2 and the low transmittance of alpha-BaB2O4 (alpha-BBO) hinder their efficient application for wavelength below 200 nm. For example, deep ultraviolet (DUV) birefringent materials for light polarization are urgently needed for DUV lithography. Here we demonstrate based on computational and experimental results that parallel chains of corner-connected planar sp(2)-hybridized BO3 groups found in Ca(BO2)(2) effectively produce large birefringence. Ca(BO2)(2) achieves three vital "best" properties including the shortest UV cutoff edge, the largest birefringence, and the highest laser-induced damage threshold (LIDT) compared to all the reported borate birefringent materials. On the basis of a Ca(BO2)(2) single crystal, a DUV Glan polarizer has been realized and is more efficient than one constructed with commercially available MgF2.