Length Adjustment of Carbon Nanotube Probe by Electron Bombardment
Length Adjustment of Carbon Nanotube Probe by Electron Bombardment
复制标题
DOI：
10.1143/jjap.41.4887
复制
发表时间：
2002-07
影响因子：
1.5
通讯作者：
S. Akita;Y. Nakayama
中科院分区：
文献类型：
--
作者：
S. Akita;Y. Nakayama
利用安装在扫描电子显微镜上的纳米操纵器，研究了一种基于热辅助场蒸发过程的单纳米管加工方法。将一根纳米管相对放置，相距约1微米，并在它们之间施加电压。随着电压的增加，其中一根纳米管在尖端被电子轰击局部加热，并通过热辅助场蒸发缩短，其中另一根纳米管用作电子发射源。原子力显微镜探针的纳米管已经成功地在~ 100纳米的尺度上使用所提出的方法。
A method for the processing of an individual nanotube, which is based on the thermally assisted field evaporation process, has been performed using a nanomanipulator installed in a scanning electron microscope. One nanotube is placed opposite another at a distance of about one micrometer and voltage is applied between them. As the voltage is increased, one of the nanotubes is locally heated by electron bombardment at the tip and is shortened by thermally assisted field evaporation, where another nanotube is used as an electron emission source. A nanotube for an atomic force microscope probe has successfully been processed on a scale of ∼ 100 nm using the proposed method.