Growth of Bi_2Sr_2Ca_<n-1>Cu_nO_y superconductor films in off-axis geometry by rf magnetron sputtering method with multi-target

Growth of Bi_2Sr_2Ca_<n-1>Cu_nO_y superconductor films in off-axis geometry by rf magnetron sputtering method with multi-target
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多靶射频磁控溅射法生长离轴Bi_2Sr_2Ca_<n-1>Cu_nO_y超导薄膜

DOI:
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发表时间:
2007
期刊:
Proceedings of the 9th International Symposium on Sputtering and Plasma Processes 9
影响因子:
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通讯作者:
T. Yamane
T. Yamane
中科院分区:
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文献类型:
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作者:
浅子和美;板明果;上田貴子;板 明果;浅子和美(編著);S. Adachi;T. Yamane

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