Materials processing at atmospheric pressure: Nonequilibrium effects on nanotechnology and mega-industries
Materials processing at atmospheric pressure: Nonequilibrium effects on nanotechnology and mega-industries
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DOI：
10.1351/pac200678061157
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发表时间：
2006-01
影响因子：
1.8
通讯作者：
T. Nozaki;K. Okazaki
中科院分区：
文献类型：
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作者：
T. Nozaki;K. Okazaki
常压非平衡等离子体以其在简单反应器中形成反应性等离子体的独特优势，不仅在材料加工领域，而且在能源和环境领域都得到了广泛的应用。我们小组探索了丝状和漫反射势垒放电的新应用，包括建立适当的模型，使给定的等离子体工艺能够更好地优化。最近，在亚毫米到微米反应堆中产生的微等离子体也与大气压非平衡等离子体联系在一起，因为这种小规模等离子体经常需要高密度介质来产生。本文综述了我们最近的几个项目：(1)利用丝状阻挡放电进行甲烷水蒸气重整；(2)在大气压射频放电(APRFD)中沉积碳纳米管；(3)利用微等离子体合成纳米硅。
Abstract Applications of atmospheric pressure nonequilibrium plasmas, because of their special advantages of forming reactive plasmas in a simple reactor, are spreading into various engineering fields, not only of materials processing, but also into energy and environment areas. Our group has explored new applications of both filamentary and diffuse barrier discharges, including the establishment of appropriate modeling, which enables better optimization of given plasma processes. More recently, microplasmas produced in submillimeter to micrometer reactors are also highlighted in association with atmospheric pressure nonequilibrium plasma because such small-scale plasmas frequently require high-density media to produce. This paper overviews our recent projects: (1) steam reforming of methane using filamentary barrier discharge; (2) deposition of carbon nanotubes in atmospheric pressure radio frequency discharge (APRFD); and (3) synthesis of silicon nanoparticles using microplasma.