High-resolution nonfluorescent imaging with structured illumination for patterned surface measurement
High-resolution nonfluorescent imaging with structured illumination for patterned surface measurement
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DOI：
10.1088/1361-6501/ab85d7
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发表时间：
2020-05
影响因子：
2.4
通讯作者：
S. Usuki;G. Shibata;K. Miura
中科院分区：
文献类型：
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作者：
S. Usuki;G. Shibata;K. Miura
表面图案化在各种应用中被广泛地执行，并且因此需要图案化表面的高分辨率、高通量和非破坏性测量。目前用于这种测量的光学方法在空间分辨率方面受到衍射极限的限制。在这项研究中，结构照明用于高分辨率宽视场成像测量。结构化照明显微术是众所周知的荧光生物成像技术。然而，对于非荧光成像和工业测量应用，结构化照明图案产生的斑点噪声、环境振动和热漂移会给照明图案的高精度定位和控制带来问题。为了解决这些问题，我们开发了一种结构照明显微镜，通过使用额外的干涉测量系统来检测作为条纹信号的结构照明的相位。在该系统中，采用低相干光源用于照明图案生成和具有低散斑噪声的高分辨率成像。构造的光学系统由多个迈克尔逊干涉仪，允许低相干干涉条纹在样品位置的操作和通过另一个传感器的相位检测。通过超分辨率图像处理反馈结构化照明相位可以实现鲁棒成像。我们通过实验实现了高分辨率的非荧光成像，具有低斑点噪声，并在没有高精度定位平台的情况下解决了超出衍射极限的图案化表面。此外，通过采用傅立叶重叠关联成像方法，改进了结构照明显微镜中常用的图像重建算法。因此，伪影减少，以及减少亮度和间距误差，实现了，这一结果代表了一个进步，在实际的测量方法的图案化表面的发展。
Surface patterning is widely performed in various applications, and hence high-resolution, high-throughput, and nondestructive measurement of patterned surfaces is required. The current optical methods used for such measurements are constrained, in terms of spatial resolution, by the diffraction limit. In this study, structured illumination was employed for high-resolution wide-field imaging measurements. Structured illumination microscopy is well known as a fluorescent bio-imaging technique. For nonfluorescent imaging and industrial measurement applications, however, speckle noise, generated by the structured illumination pattern, environmental vibrations, and thermal drift, causes problems for the high-precision positioning and control of the illumination pattern. To solve these problems, we developed a structured illumination microscope that detects the phase of the structured illumination as a fringe signal by using an additional interferometric measurement system. In this system, a low-coherence light source is employed for illumination pattern generation and high-resolution imaging with low speckle noise. The constructed optical system consists of multiple Michelson interferometers that allow the manipulation of low-coherence interference fringes at the sample position and the detection of the phase via another sensor. Robust imaging can be implemented by feeding back the structured illumination phase through super-resolution image processing. We experimentally achieved high-resolution nonfluorescent imaging with low speckle noise and resolved patterned surfaces beyond the diffraction limit without high-precision positioning stages. Furthermore, the image reconstruction algorithm typically used in structured illumination microscopy was improved by adopting a Fourier ptychography approach. Thus, artifact reduction, as well as decreases in luminance and pitch errors, was achieved, and this result represents a step forward in the development of practical measurement methods for patterned surfaces.