T.KOSUGI,H.IWASE,K.GAMO: "The characteristics of ion beam assisted etching of GaAs by pulsed focused ion beam irradiation" Microelectronic Eng.
T.KOSUGI,H.IWASE,K.GAMO: "The characteristics of ion beam assisted etching of GaAs by pulsed focused ion beam irradiation" Microelectronic Eng.
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T.KOSUGI,H.IWASE,K.GAMO:“脉冲聚焦离子束照射的离子束辅助蚀刻 GaAs 的特性”微电子工程。
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