Optical constants of graphene measured by spectroscopic ellipsometry

Optical constants of graphene measured by spectroscopic ellipsometry
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DOI:
10.1063/1.3475393
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发表时间:
2010-08-30
影响因子:
4
通讯作者:
van de Sanden, M. C. M.
van de Sanden, M. C. M.
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Weber, J. W.;Calado, V. E.;van de Sanden, M. C. M.

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用带有聚焦点(类似于100 X 55 μ m(2))的光谱椭偏仪以55度角扫描顶部有98 nm二氧化硅的硅片上机械剥离的石墨烯薄片(类似于150 X 380 μ m(2))。用b样条参数化光学常数的光学模型对椭偏光谱数据进行了分析。该参数化是同时精确测定210 ~ 1000 nm波长范围内光学常数和石墨烯厚度(3.4埃)的关键。(C) 2010年美国物理研究所。(doi: 10.1063/1.3475393)
A mechanically exfoliated graphene flake (similar to 150 X 380,mu m(2)) on a silicon, wafer with 98 nm silicon dioxide on top was scanned with a spectroscopic ellipsometer with a focused spot (similar to 100 X 55 mu m(2)) at an angle of 55 degrees. The spectroscopic ellipsometric data were analyzed with an optical model in which the optical constants were parameterized by B-splines. This parameterization is the key for the simultaneous accurate determination of the optical constants in the wavelength range 210-1000 nm and the thickness of graphene, which was found to be 3.4 angstrom. (C) 2010 American Institute of Physics. [doi:10.1063/1.3475393]