Heteroepitaxial growth of ε-Ga2O3 thin films on c-plane sapphire and GaN templates by HVPE
Heteroepitaxial growth of ε-Ga2O3 thin films on c-plane sapphire and GaN templates by HVPE
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HVPE 在 c 面蓝宝石和 GaN 模板上异质外延生长 ε-Ga2O3 薄膜
DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
Hisashi Murakami and Yoshinao Kumagai
中科院分区:
文献类型:
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作者:
Mayuko Sato;Nao Takekawa;Keita Konishi;Hisashi Murakami and Yoshinao Kumagai