Mg-doped InSnO nanofiber field-effect transistor for methanol gas detection at room temperature
Mg-doped InSnO nanofiber field-effect transistor for methanol gas detection at room temperature
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DOI：
10.1088/1361-6528/ac512d
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发表时间：
2022-02
期刊：
影响因子：
3.5
通讯作者：
Linkang Li;Jun Li;Wenhui Fu;Dongliang Jiang;Yanjie Song;Qiuhong Yang;Wenqing Zhu;Jianhua Zhang-Jianhua-Z
中科院分区：
文献类型：
--
作者：
Linkang Li;Jun Li;Wenhui Fu;Dongliang Jiang;Yanjie Song;Qiuhong Yang;Wenqing Zhu;Jianhua Zhang-Jianhua-Z
检测有毒有害甲醇气体的高性能气体传感器的研究仍然是一个非常重要的问题。对于气体传感器来说，能够在室温下实现低浓度检测是非常重要的。本工作采用静电纺丝法制备了Mg掺杂InSnO薄膜场效应晶体管（FET）甲醇气体传感器。当Mg元素掺杂浓度为2.3摩尔%时，InSnO MOSFET具有优异的电学性能，包括较高的迁移率（3.17 cm 2 V-1 s-1），阈值电压（1.51 V），亚阈值摆幅（0.42 V/decade），良好的开/关电流比（108），Mg掺杂使InSnO MOSFET的正偏置应力稳定性得到了很大的提高。此外，在室温下，InSnMgO MOSFET气体传感器对甲醇气体具有可接受的气体选择性和灵敏度。在室温下的甲醇气体传感器测试中，当室温下甲醇气体浓度为60 ppm时，InSnMgO MOSFET气体传感器的响应值为81.92;当甲醇浓度为5 ppm时，响应值仍为1.21。该工作为在室温下构建气体传感器并用于检测甲醇气体提供了一种有效的新方法。
Research on high-performance gas sensors for detecting toxic and harmful methanol gas is still a very important issue. For gas sensors, it is very important to be able to achieve low concentration detection at room temperature. In this work, we used the electrospinning method to prepare Mg-doped InSnO nanofiber field-effect transistors (FETs) methanol gas sensor. When the Mg element doping concentration is 2.3 mol.%, InSnO nanofiber FET exhibits excellent electrical properties, including higher mobility of 3.17 cm2 V−1 s−1, threshold voltage of 1.51 V, subthreshold swing of 0.42 V/decade, the excellent on/off current ratio is about 108 and the positive bias stress stability of the InSnO nanofiber FET through Mg doping has been greatly improved. In addition, the InSnMgO nanofiber FET gas sensor exhibits acceptable gas selectivity and sensitivity to methanol gas at room temperature. In the methanol gas sensor test at room temperature, when the methanol gas concentration is 60 ppm at room temperature, the response value of the InSnMgO nanofiber FET gas sensor is 81.92; and when the methanol concentration is 5 ppm, the response value is still 1.21. This work provides an effective and novel way to build a gas sensor at room temperature and use it to detect methanol gas at room temperature.